exel web app Event code 3005

Hello.

I have Sharepoint 2013 foundation and also Web App Server 2013.

I can successfuly open word, pdf and power point documents from sharepoint site via web app server.

But if I try to open Exel file I got an error.

I can translate it like:

Communicating problem with the server. Maybe server does not respond or your Internet connection has been terminated. Please try again later.

Also at same time a can see in events on WebApp Server

Event code: 3005 
Event message: An unhandled exception has occurred. 
Event time: 17.08.2013 11:48:18 
Event time (UTC): 17.08.2013 7:48:18 
Event ID: 4d94e7a3ac8346bcba80f37e7acaacd9 
Event sequence: 153 
Event occurrence: 64 
Event detail code: 0 
 
Application information: 
    Application domain: /LM/W3SVC/2/ROOT/x-1-130211975613464980 
    Trust level: Full 
    Application Virtual Path: /x 
    Application Path: C:\Program Files\Microsoft Office Web Apps\ExcelServicesWfe\ 
    Machine name: server-web-app 
 
Process information: 
    Process ID: 7600 
    Process name: w3wp.exe 
    Account name: NT AUTHORITY\NETWORK SERVICE 
 
Exception information: 
    Exception type: InvalidOperationException 
    Exception message: Request format is unrecognized for URL unexpectedly ending in '/GetRangeContent'.
   at System.Web.Services.Protocols.WebServiceHandlerFactory.CoreGetHandler(Type type, HttpContext context, HttpRequest request, HttpResponse response)
   at System.Web.Services.Protocols.WebServiceHandlerFactory.GetHandler(HttpContext context, String verb, String url, String filePath)
   at System.Web.Script.Services.ScriptHandlerFactory.GetHandler(HttpContext context, String requestType, String url, String pathTranslated)
   at System.Web.HttpApplication.MaterializeHandlerExecutionStep.System.Web.HttpApplication.IExecutionStep.Execute()
   at System.Web.HttpApplication.ExecuteStep(IExecutionStep step, Boolean& completedSynchronously)

Request information: 
    Request URL: https://owas.contoso.com:443/x/_vti_bin/DynamicGridContent.json/GetRangeContent?context={"SessionId":"32.0f5a91f0713c49a68ce7bc1d4c9d3fd61.D87.1.V23.518eg+TOom0CG021fekqIC/14.5.ru-RU5.ru-RU32.0b89a505b3004cdd926b8870876d444e1.S1.N","TransientEditSessionToken":null,"PermissionFlags":786367,"Configurations":1585936,"CompleteResponseTimeout":0,"CollaborationParameter":{"CollaborationState":{}},"ExcelFeatures":1515932864734,"WorkbookMetadataParameter":{"WorkbookMetadataState":{"MetadataVersion":0,"ServerEventVersion":0}},"MachineCluster":null,"AjaxOptions":0}&ewaControlId="m_excelWebRenderer_ewaCtl_m_ewa"&currentObject="Лист1"&namedObjectViewData={"Mode":1,"Settings":2}&row=0&column=0&rowCount=28&columnCount=30&blockX=0&blockY=0&revision=1&renderingOptions=0 
    Request path: /x/_vti_bin/DynamicGridContent.json/GetRangeContent 
    User host address: 1.2.3.4 
    User:  
    Is authenticated: False 
    Authentication Type:  
    Thread account name: NT AUTHORITY\NETWORK SERVICE 
 
Thread information: 
    Thread ID: 52 
    Thread account name: NT AUTHORITY\NETWORK SERVICE 
    Is impersonating: False 
    Stack trace:    at System.Web.Services.Protocols.WebServiceHandlerFactory.CoreGetHandler(Type type, HttpContext context, HttpRequest request, HttpResponse response)
   at System.Web.Services.Protocols.WebServiceHandlerFactory.GetHandler(HttpContext context, String verb, String url, String filePath)
   at System.Web.Script.Services.ScriptHandlerFactory.GetHandler(HttpContext context, String requestType, String url, String pathTranslated)
   at System.Web.HttpApplication.MaterializeHandlerExecutionStep.System.Web.HttpApplication.IExecutionStep.Execute()
   at System.Web.HttpApplication.ExecuteStep(IExecutionStep step, Boolean& completedSynchronously)

Any idea how to solve it?